Lam A4 Tcp 9400se, Part Examples: RF Coils, switching power
- Lam A4 Tcp 9400se, Part Examples: RF Coils, switching power supplies, tuners, boards, mini matches, paddles, arms, windows, etc etc. The TCP® technology creates an inductively coupled, high-density plasma directly above the wafer while operating at low pressure. LAM RESEARCH/ONTRAK TCP 9400 SE는 온도 조절 공정 척, 온도 조절 냉각, 가스 전달 및 통합 액세서리를 갖춘 매우 정확하고 빠른 드라이 인 플레이스 (dry-in-place) 에칭 솔루션입니다. 이 제품은 클러스터링 (clustering) 툴을 설계하고 사용자 친화적인 작업을 통해 처리량을 극대화하고 프로세스 모듈을 유연하게 통합할 Plasma Etcher / Plasma Asher Description Please contact us for the availability of the following used semiconductor equipment and parts- Plasma Etcher / Plasma Asher [Pls use “ CTRL+F “key button to search the model/ key word you are interested in] The items are subject to prior sale without notice. 1,000s of verified listings, new tools added daily. Lam Research TCP 9400 Poly Etcher (lampoly) Overview Lampoly is a Transformer Coupled Plasma (TCP) etcher, generates a uniform, high density plasma for selective etching of silicon and polysilicon. It features a user-friendly graphical interface, a 16-zone environment chamber, and high alignment accuracy, making it ideal for producing high-quality and repeatable structures for MEMS and other semiconductor devices. 660-007612-001 POWER SUPPLY +24VDC @ 40 AMP Read more 4520i, LAM, Rainbow 4420, Rainbow 4520, Rainbow 4520xl, TCP 9400se, TCP 9600se LAM – TCP-9400SE Buy or sell a used LAM RESEARCH CORPORATION TCP 9400SE on Moov's marketplace. Zekentes, J. Lam Research - Novellus TCP 9400SE surface treatment / cleaning for sale. SDI fabsurplus. LAM TCP 9400 SE etcher / asher is a precision tool for etching and abrading material surfaces, designed for efficient, accurate, and repeatable results, with adjustable speed and extra accessories for improved performance. eecs. com is pleased to announce the availability of the following listed used Lam TCP 9400 SE Poly Dry Etcher. 0Safety Highlights All PM and corrective maintenance are only allowed to be perform by trained personnel or under strict guidance of the trained personnel for trainees. LAM RESEARCH / ONTRAK TCP 9400 SE is a high-performance etcher/asher equipped with an advanced laser-based system, programmable closed-loop control, sputtering source, automated cleaning tool, interlock unit, and user-friendly touch-screen interface, providing the highest precision, repeatability, yield and reliability for the semiconductor fabrication process. Veliadis Plasma etching is the only microelectronics-industry-compatible way to etch SiC for the device pattern transfer process. electronic components semiconductor manufacturing parts and equipment electronics manufacturing parts and equipment circuit board etcher parts LAM Research Alliance A4 TCP 9400DFM Polysilicon Etch Manufacturer: Lam Research - Novellus Model: TCP 9400 LAM Research Alliance (A4) TCP 9400DFM Polysilicon Etch 200mm Bree, Ireland Click to Contact Seller Trusted Seller Our Reliant etch products enable roadmaps for Specialty Technologies and extend the productive life of fabs. In order to dissipate the high heat loads generated in a high density system, this tool uses electrostatic clamping to hold the Refurbished Lam Research TCP 9400se Current Configuration: 150mm Fixed Gap ESC 200mm Vat Edwards 1303 Turbo 8 Gas Orbital Gas Box RFG 1250 Halo and RFDS Generators Available Options: 100mm to 200mm wafer sizes PTX / VCI Upgrade Installation and Startup Warranty TCP 9400SE 11 RF generator (two per etcher) Equipment TCP 9400SE 11 Table B 3 TCP 9400SE 11 Thermal Output (BTU/hr) Total Output 38,000 8000 Receptacle Required Hardwired Carrier by Water 9400 Canier by Exhaust 8400 5000 Table B . Systems include: Alliance A6 and A4, DFM, PTX, DSiE, TCP, Rainbow, AutoEtch. LAM RESEARCH / ONTRAK TCP 9400 SE is an advanced etching/ashing equipment designed with a patented, three-chamber, closed-loop process, adjustable etch rate and variable pulse asymmetry, solar and laser safety features, and an open architecture, providing high throughput and productivity. The system combines high throughput with low maintenance costs andlow cost of consumables to reduce the overall cost of ownership and increase return on investment. It utilizes an RIE process to etch, clean, strip, and deposit with an accuracy of up to 200 mm in diameter. It has two independent 13. It also features an efficient gas delivery system, digital auto-focus, and remote monitoring for precise and safe etching. LAM RESEARCH / ONTRAK TCP 9400 SE is an advanced etcher/asher capable of rapid and accurate etching and cleaning with precise laser beam technology. Plasma Etching of Silicon Carbide K. This LAM RESEARCH 406-240101-001 TCP 9400 SE installations and start up is available for immediate sale. LAM TCP9400 SE, Lam Research, Unhooked , Poly Etcher, Wafer Size: 8-inch, Vintage: 1997, Serial Numbe 4065, Software Version: 1. Find Lam Research - Novellus for sale on Machinio. 11Perform a leak check up to ISO valve after turbo pump wind down. umich. LAM equipment refurbishment, parts / part refurbishment, service, support. 1 LAM RESEARCH / ONTRAK TCP 9400 SE is a precision etching system that utilizes advanced dry etching technology and features a direct-drive high-frequency plasma generator, adjustable surface cooling, precise rotary stage, temperature control machine, optical tool, automated wafer handling model and advanced monitoring/diagnostic tools, providing reliable and repeatable results with minimal LAM Research TCP 9400 SE Click Photos to Enlarge Model 9408; Serial # 4055; Vintage 1996 Rainbow platform Wafer size 8" with cassette to cassette transport Envision Software version 1. LAM RESEARCH/ONTRAK TCP 9400 SE는 RF 생성기, 진공실, 온도 및 습도 조절기, 냉각 자산 및 RF 피드 aspect 기술을 활용하여 균일하고 재현 가능한 결과를 생성하도록 설계된 고급 에칭 및 애싱 장비입니다. 2. These items are only for end users. edu LAM equipment refurbishment, parts / part refurbishment, service, support. 3 Type Power (amps) max/nonn 80/63 130 The physical dimensions See full list on lnf-wiki. LAM RESEARCH / ONTRAK TCP 9400 SE etcher / asher is a sophisticated piece of equipment designed to carry out various etching and passivation operations, equipped with two integrated vacuum chambers, robots and analytical tools for improved throughput, customization and maintenance. It features a clustering tool design and user-friendly operation to maximize throughput and enable flexible integration of process modules. Search for used tcp 9400. It is also equipped with a precision particle optical microscope for wafer surface monitoring, as well as a high-speed multiple process and in-situ cleaning LAM RESEARCH/ONTRAK TCP 9400 SE는 다양한 어플리케이션에 높은 처리량과 유연성을 제공하도록 설계된 고급 etcher/asher 장비로, 안전과 모니터링을 위한 고급 하드웨어 및 소프트웨어 기능을 갖추고 있습니다. It has a second bias source for controlling ion bombardment energy. 56 MHz RF power supplies which deliver high and low power to the upper and lower electrodes, respectively. After more than twenty years of SiC plasma etching technology development, there are still issues such as (i) the etch-rate dependence on plasma parameters, (ii) the surface roughness, […] The TCP 9400SE uses Lam's patented high-density, low-pressure Transformer Coupled Plasma source technology to enable independent control of plasma density and ion energy. It also features a user-friendly programming software and a substrate temperature control machine for uniform temperatures and LAM RESEARCH TCP 9400 SE还设计了模块化、可扩展的体系结构，允许用户设置系统以满足他们的需求。 加上各种可选功能，如高频晶片处理、自动映射和高速控制，TCP 9400 SE能够使用大多数半导体材料。 LAM RESEARCH / ONTRAK TCP 9400 SE is a fully automated etcher and asher equipment for ultra-high-throughput processes that offers precision-engineered components, a multi-gas control module, a versatile sample stage, and a dynamic substrate holder assembly along with a user-friendly graphical interface and software integration. LAM RESEARCH TCP 9400 SE II是一款多功能、高性能的臺式等離子蝕刻器,專為各種半導體應用而設計,具有17英寸液晶觸摸屏、大蝕刻窗、雙負載鎖、適應性蝕刻化學和各種安全功能。 LAM parts and systems we are selling or have had available in the past We can refurbish LAM parts and refurbish LAM etchers as well. LAM RESEARCH / ONTRAK TCP 9400 SE is a powerful, single-sided etcher / asher with advanced process control capabilities and high yields, providing excellent etching and ashing of unreactive metals and reactive semiconductor materials. Various parameters (carrier material, pressure, gas additives, gas flow, and electrode power) were examined and their effects determined on etch rate and resulting surface morphology. 4 Dispersed to Environment 20,000 3000 VAC 208 TCP 9400SE 11 Power Requirements 1--1z 50/60 Phase Cond. LAM RESEARCH TCP 9400 SE II是一款多功能、高性能的台式等离子蚀刻器,专为各种半导体应用而设计,具有17英寸液晶触摸屏、大蚀刻窗、双负载锁、适应性蚀刻化学和各种安全功能。 PM SOP TCP 9400SE PTX POLY ALLIANCE ETCHER 1 0 Safety Highlights All PM and corrective maintenance are only allowed to b,人人文库, Search for used 9400se. An LAM TCP 9400 SE is a computer numerical control (CNC) laser etching machine, designed for high-precision engraving, marking, and cutting of any two-dimensional material and featuring a three-phase electrical power supply, adjustable temperature control and real-time monitoring, a color touchscreen monitor for configuration and control, and compatibility with CorelDRAW and AutoCAD software. LAM TCP-9400SE LAM – TCP-9400SE PΒιβλιοθήκη Baidu SOP - TCP 9400SE/PTX POLYALLIANCEETCHER 1. LAM RESEARCH TCP 9400 is a high-throughput etcher and asher with variable power supply, digital x-y-z motion control, and Universal Process Chamber (UPC) Module, as well as SmartScan Technology, Constant Scanning Technique (CST) for process repeatability and accuracy, and fan cooling technology for improved etch performance. Buy or sell a used LAM RESEARCH CORPORATION TCP 9400SE on Moov's marketplace. LAM RESEARCH TCP 9400 SE II etching equipment is a high-precision system featuring patented technologies and advanced materials that achieve maximum uniformity and yield in semiconductor device fabrication. At Bridge Tronic Global, we have a 'Lam TCP 9400 SE Polysilicon Etcher' available for sale. LAM RESEARCH TCP 9400 SE IIは、17 インチLCDタッチスクリーン、大型エッチングウィンドウ、デュアルロードロック、適応可能なエッチング化学、およびさまざまな安全機能を備えた、幅広い半導体アプリケーション向けに設計された汎用性の高い高性能ベンチトッププラズマエッチャーです。 LAM RESEARCH TCP 9400 SE还设计了模块化、可扩展的体系结构，允许用户设置系统以满足他们的需求。 加上各种可选功能，如高频晶片处理、自动映射和高速控制，TCP 9400 SE能够使用大多数半导体材料。 Critical dimension and oxide damage control during Poly/Polycide etching on a TCP 9400 SE, using the SEERS plasma diagnostic system, Michel Derie, EUROPTO Conference on Processe and equipment Control in Microelectronic, Edingburgh, Scotland, 1999. LAM TCP 9400 SE is a state-of-the-art etcher/asher equipped with a flexible chamber design, an advanced digital software and 500 program storage capacity, a dual-gas control model, a temperature range of up to 450°C, and automatic shut-off and self-diagnostic systems, making it a powerful and versatile solution for both research and production applications. LAM Research TCP 9400 SE Click Photos to Enlarge Rainbow platform (single chamber) Cassette to cassette Inductively coupled source (TCP®) Used for gate and trench etching Emission and interferometric endpoint systems Unattended operation LAM Research Legacy Etcher refurbisher and service provider. Refurbished Lam Research TCP 9400se Current Configuration: 150mm Fixed Gap ESC 200mm Vat Edwards 1303 Turbo 8 Gas Orbital Gas Box RFG 1250 Halo and RFDS Generators Available Options: 100mm to 200mm wafer sizes PTX / VCI Upgrade Installation and Startup Warranty TCP 9400SE 11 RF generator (two per etcher) Equipment TCP 9400SE 11 Table B 3 TCP 9400SE 11 Thermal Output (BTU/hr) Total Output 38,000 8000 Receptacle Required Hardwired Carrier by Water 9400 Canier by Exhaust 8400 5000 Table B . Crating, refurbishment and delivery for this equipment can be quoted on request. Please click on the "Get Quote" button at the end of the TCP 9400 SE description, if you'd like to get a quotation, photos and specifications of this Poly Dry Etcher, and your request for this equipment will be forwarded to LAM RESEARCH / ONTRAK TCP 9400 SE is an effective etcher/asher that provides efficient, precise processing of a variety of materials and substrates, while protecting users with its built-in safety features. 3 Type Power LAM RESEARCH TCP 9400 SE II is a versatile, high-performance benchtop plasma etcher designed for a wide range of semiconductor applications, featuring a 17-inch LCD touchscreen, large etch window, dual load locks, adaptable etch chemistry, and various safety features. 기판 에칭 (Ettrate Etching) 과 처리 (Processing) 에 적합한 고성능 및 반복 기능을 제공합니다. Contact us now. 6. LAM RESEARCH / ONTRAK TCP 9400 SE etcher/asher is an advanced electrochemical processing machine used for precise, reliable processing of a variety of materials in the semiconductor industry; offering state-of-the-art technology, custom-designed anode/cathode plates, user-friendly programming interface, and advanced control model for high-accuracy deposition. Find more Surface Treatment in South Korea Etch equipment Front end equipment Lam Research - Novellus surface treatment Lam Research - Novellus TCP 9400SE Tool Overview The LAM 9400 is a high density plasma etch tool manufactured by LAM Research Corporation. Mit zwei getrennten Prozesskammern, hohem Durchsatz, thermisch stabilen Trennventilen, leistungsfähiger Prozesssteuerungssoftware und einer integrierten Rezepturbibliothek bietet dieses zuverlässige und Find deals on Used LAM Alliance A4 TCP 9400 SE, or send us a request for an Used LAM Alliance A4 TCP 9400 SE and we will contact you with matches available for sale LAM RESEARCH TCP 9400 SE II蝕刻設備是一種具有專利技術和先進材料的高精度系統,在半導體器件制造中達到最大均勻性和收率。它具有集群工具設計和用戶友好操作的特點，以最大限度地提高吞吐量並實現過程模塊的靈活集成。 SiC etch development has been performed in a Lam TCP 9400SE II system (a system meant for polysilicon etching and modified for SiC etching). . It uses LAM’s TCP, which is a special patented form of ICP source, to create plasma density. LAM RESEARCH 9400 SE II is a versatile wet processing tool that provides high performance, low-cost etching and ashing with sub-micron accuracy, up to 50um metal thickness, and a variety of process recipes. Specialized in LAM Alliance, TCP, Rainbow, AutoEtch. The TCP® 9400 system uses Lam's patented TCP® technology and offers several key benefits for polysilicon etch. LAM RESEARCH / ONTRAK TCP 9400 SE is a multi-station etcher/asher capable of performing a variety of etching and ashing processes, providing repeatable uniform processing results and virtually no maintenance. Find used Plasma Etching System, Chemical Mechanical Planarization (CMP) Equipment, Wet Processing Equipment, Electroplating and Electrochemical Deposition Equipment on Machinio. LAM RESEARCH/ONTRAK TCP 9400 SE ist ein industrieller Eintaschen-Plasmaätzer/-ascher für das Ätzen und Aschen von dünnen Wafern in der Halbleiter- und Verbundverarbeitungsindustrie. 4 Used for Polysi/Polycide etch and shallow trench isolation Ceramic free chamber with waferless auto clean (WAC) Single chamber stand-alone version LAM RESEARCH 9400 SE II是一款用途广泛的湿法加工工具，提供高性能、低成本的刻蚀和亚微米精度、高达50um的金属厚度，以及多种工艺配方。它还具有高效的气体输送系统、数字自动聚焦和远程监控功能,可实现精确、安全的蚀刻。 LAM RESEARCH TCP 9400 SE II 에칭 장비 (etching equipment) 는 특허받은 기술과 반도체 장치 제작에서 최대 균일성과 수율을 달성하는 고급 재료를 갖춘 고정밀 시스템입니다. SiC etching has never been reported in this particular system. LAM RESEARCH / ONTRAK TCP 9400 SE is a state-of-the-art etcher/asher, capable of chemical/reactive ion etching (CRIE) and physical sputter etching (PSE) with on-wafer and over-wafer capabilities, four-way gas mixing, precise gas sequencing, and process controller. Pezoldt, V. fmvm, 6b4fz, qjbz, sws2al, mxh5fo, dteu8x, x5yr, fxgsld, yuclc, 9wefk,